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High Temperature Thermal Mass Flow Controllers & Meters
Highest-purity flow path for challenging high-temperature applications.
Many of today’s advanced electronic device fabrication processes require extremely accurate and highly repeatable measurement and control of expensive ultra-pure gases and liquid precursors.  Brooks Instrument meets those needs with our high-temperature metal sealed thermal mass flow controllers and meters. Precise chemistry control is achieved through the combination of ultra-stable, highly accurate measurement sensors, fast precision control valves and powerful digital electronics. Purity of the process chemistry is ensured by our high-integrity (leak tight), ultra-high purity, all-metal wetted flow path, designed to keep outside contaminants like moisture and oxygen from corrupting the process media.
 
KEY APPLICATIONS
  • Optical fiber manufacturing - MCVD
  • Silicon semiconductor device fabrication processes
  • CVD (precursor delivery in vapor form)
  • Strip (water vapor)
  • Etch (water vapor for passivation)
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